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| HybrYX™ G5 Large Substrate Positioning Stage |
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The unique hybrid architecture of HybrYX G5 offers the following outstanding performance characteristics for demanding large payload applications:
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Design is closely based on smaller HybrYX stage but with larger ceramic carriage and Y-axis guide beam- Large, 1400mm travel in the Y (scanning) axis is well suited for up to Generation 5 flat panel display substrates or photovoltaic panels
- Capable of providing ±3µm accuracy over a full XY travel range of 1400mm by 400mm
- Long-life & high MTBF as air bearing is not limited by bearing travel/life-expectancy
- Optional Z-Tip-Tilt and Theta functionality without significant increase to mass and profile (height)
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Product Summary
Product Detail
Specifications
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The all-new HybrYXTM single plane XY hybrid stages are the latest addition to Newport’s air bearing products offering the advantages of a single plane air bearing stage at a much lower cost than previously possible. The HybrYX G5 provides the advantages of a single plane architecture in a stage designed specifically for large payloads.
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