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Home > Products > Light Sources > Photolithography Instruments > Oriel Flood Exposure Sources

Oriel Flood Exposure Sources

97436 500 W Oriel^® Flood Exposure Source, 6 x 6 inch Beam Size (9.5 inch high pedestal not shown).

Highly uniform, large collimated beams
Efficient out of band rejection
Timed exposures

Product Description Product Detail Specifications Drawings Catalog PDF

Product Description

We offer 500 and 1000 W Flood Exposure Sources for the near UV (350 - 450 nm), mid UV (260 - 320 nm) and deep UV (220 - 260 nm). NUV is designed to expose most photoresists, MUV is used for polymer cross-linking and novel resists, and DUV for deep ultraviolet studies. Our illuminators irradiate samples from 2.13 x 2.13 inches up to 10 x 10 inches (54x54 to 254x254 mm).

Ordering Information

Quantity	Model	Description	Price
	97530	Flood Exposure Source, 500W Hg(Xe), 2.13 x 2.13 in. Beam, ± 4.6° Collimation, 28mW cm^-2, 220 - 260nm
	97532	Flood Exposure Source, 500W Hg(Xe), 4.25 x 4.25 in. Beam, ± 2.6° Collimation, 8mW cm^-2, 220 - 260nm
	97534	Flood Exposure Source, 500W Hg(Xe), 6.0 x 6.0 in. Beam, ± 1.8° Collimation, 4mW cm^-2, 220 - 260nm
	97536	Flood Exposure Source, 500W Hg(Xe), 8.0 x 8.0 in. Beam, ± 1.4° Collimation, 3mW cm^-2, 220 - 260nm
	92511	Flood Exposure Source, 2.13 x 2.13 in. Output, ± 6.6° Collimation, 59mW cm^-2, 220 - 260nm
	92521	Flood Exposure Source, 4.25 x 4.25 in. Output, ± 3.8° Collimation, 17mW cm^-2, 220 - 260nm
	92531	Flood Exposure Source, 6.0 x 6.0 in. Output, ± 2.5° Collimation, 8.4mW cm^-2, 220 - 260nm
	92541	Flood Exposure Source, 8.0 x 8.0 in. Output, ± 2.0° Collimation, 4.9mW cm^-2, 220 - 260nm
	92551	Flood Exposure Source, 10.0 x 10.0 in. Output, ± 1.6° Collimation, 3.5mW cm^-2, 220 - 260nm
	97531	Flood Exposure Source, 500W Hg(Xe), 2.13 x 2.13 in. Beam, ± 4.6° Collimation, 121mW cm^-2, 260 - 320nm
	97533	Flood Exposure Source, 500W Hg(Xe), 4.25 x 4.25 in. Beam, ± 2.6° Collimation, 35mW cm^-2, 260 - 320nm
	97535	Flood Exposure Source, 500W Hg(Xe), 6.0 x 6.0 in. Beam, ± 1.8° Collimation, 17mW cm^-2, 260 - 320nm
	97537	Flood Exposure Source, 500W Hg(Xe), 8.0 x 8.0 in. Beam, ± 1.4° Collimation, 9mW cm^-2, 260 - 320nm
	92512	Flood Exposure Source, 2.13 x 2.13 in. Output, ± 6.6° Collimation, 224mW cm^-2, 260 - 320nm
	92522	Flood Exposure Source, 4.25 x 4.25 in. Output, ± 3.8° Collimation, 64mW cm^-2, 260 - 320nm
	92532	Flood Exposure Source, 6.0 x 6.0 in. Output, ± 2.5° Collimation, 34mW cm^-2, 260 - 320nm
	92542	Flood Exposure Source, 8.0 x 8.0 in. Output, ± 2.0° Collimation, 18mW cm^-2, 260 - 320nm
	92552	Flood Exposure Source, 10.0 x 10.0 in. Output, ± 1.6° Collimation, 12mW cm^-2, 260 - 320nm
	97434	Flood Exposure Source, 500W Mercury, 2.13 x 2.13 in. Beam, ± 4.6° Collimation, 266mW cm^-2, 350 - 450nm
	97435	Flood Exposure Source, 500W Mercury, 4.25 x 4.25 in. Beam, ± 2.6° Collimation, 76mW cm^-2, 350 - 450nm
	97436	Flood Exposure Source, 500W Mercury, 6.0 x 6.0 in. Beam, ± 1.8° Collimation, 38mW cm^-2, 350 - 450nm
	97437	Flood Exposure Source, 500W Mercury, 8.0 x 8.0 in. Beam, ± 1.4° Collimation, 22mW cm^-2, 350 - 450nm
	92510	Flood Exposure Source, 2.13 x 2.13 in. Output, ± 6.6° Collimation, 305mW cm^-2, 350 - 450nm
	92520	Flood Exposure Source, 4.25 x 4.25 in. Output, ± 3.8° Collimation, 87mW cm^-2, 350 - 450nm
	92530	Flood Exposure Source, 6.0 x 6.0 in. Output, ± 2.5° Collimation, 43mW cm^-2, 350 - 450nm
	92540	Flood Exposure Source, 8.0 x 8.0 in. Output, ± 2.0° Collimation, 25mW cm^-2, 350 - 450nm
	92550	Flood Exposure Source, 10.0 x 10.0 in. Output, ± 1.6° Collimation, 17mW cm^-2, 350 - 450nm

For 500 W sources, you will also need the 87032 Filter Mounting Assembly; 1000 W sources include a filter mount.

Accessories

Quantity	Model	Description	Price
	6285	Replacement Lamp, 500 Watt Mercury
	66142	Replacement Lamp, 500 Watt Hg(Xe)
	6293	Replacement Lamp, 1000 Watt Hg(Xe)
	6295NS	Replacement Lamp, 1000 Watt Hg(Xe), Ozone Free
	84413	Calibrated Probe, 185-320nm, 240nm Peak Wavelength
	84414	Calibrated Probe, 185-320nm, 280nm Peak Wavelength
	84415	Calibrated Probe, 326-401nm, 365nm Peak Wavelength
	84416	Calibrated Probe, 320-475nm, 400nm Peak Wavelength
	84410	Power Meter
	87032	Filter Mount Assembly (for 500 W Flood Exposure Sources)
	87038	g-line (436 nm)
	87066	VIS-IR Bandpass Bocking Filter
	82000	Flood Source 1 Year Extended Care Plan
	68951	Digital Exposure Controller
	68945	Digital Exposure Timer, 10 ms to 9999 hours, 10 ms Increments
	68955	Remote Switch

Founded in 1969, Newport is a pioneering single-source solutions provider of laser and photonics components to the leaders in scientific research, life and health sciences, microelectronics, industrial manufacturing, and homeland security markets.