To build a complete photolithography system, you need the following four components in addition to the
exposure source.:
• Mask Alignment Fixture
• Substrate or Wafer Holder
• Photomask Holder
• Precision Slide
In very simple terms, the assembly resembles a movable waffle iron with micrometer adjustments. The base is the Mask Alignment Fixture, which provides X-Y-Z positioning of the "waffle." The waffle, or substrate, rests on top of the fixture in a Substrate Holder; and lastly, the lid is a Mask Holder with mask in place, which closes down over the substrate. With the substrate loaded and aligned to the mask, the assembly is manually moved into position for exposure under the collimating lens of the Illumination Source using a Slide. Exposure occurs by opening and closing the light source shutter. After exposure, the assembly is returned to its starting location for removal of the substrate.
To build a complete photolithography system, you need the following four components in addition to the
exposure source.:
• Mask Alignment Fixture
• Substrate or Wafer Holder
• Photomask Holder
• Precision Slide
In very simple terms, the assembly resembles a movable waffle iron with micrometer adjustments. The base is the Mask Alignment Fixture, which provides X-Y-Z positioning of the "waffle." The waffle, or substrate, rests on top of the fixture in a Substrate Holder; and lastly, the lid is a Mask Holder with mask in place, which closes down over the substrate. With the substrate loaded and aligned to the mask, the assembly is manually moved into position for exposure under the collimating lens of the Illumination Source using a Slide. Exposure occurs by opening and closing the light source shutter. After exposure, the assembly is returned to its starting location for removal of the substrate.